Alternating open-ended via chains for testing via formation and dielectric integrity

ABSTRACT

Kerf areas are located between the integrated circuit chips on a wafer. Via chain test structures are located in the kerf areas or test chips. The via chain test structures comprise a first conductor in a first area of the wafer. First via chains are connected at individual points to the first conductor. Each of the first via chains comprises an open-ended electrical circuit beginning at the first conductor and ending in an insulated region of a second area of the wafer. The via chain test structures comprise a second conductor in the second area. Second via chains are connected at individual points to the second conductor. Each of the second via chains comprises an open-ended electrical circuit beginning at the second conductor and ending in an insulated region of the first area.

CROSS-REFERENCE TO RELATED APPLICATIONS

This application is a divisional of U.S. patent application Ser. No.13/895,605, filed May 16, 2013, the complete disclosure of which isincorporated herein by reference.

BACKGROUND

The devices and methods herein relate to the design of via chains andserpentine/comb testable structures, and more specifically, tostructures and methods that provide lower resistance and more accuratecircuit integrity determination when testing via structures.

An integrated circuit (IC) is a semiconductor device containing manysmall, interconnected components such as diodes, transistors, resistors,and capacitors. These components function together to enable the IC toperform a task, such as control an electronic device, or perform logicoperations. ICs are found in computers, calculators, cellulartelephones, and many other electronic devices.

ICs and other semiconductor devices are fabricated on small rectangles,known as “dies,” which are filled with multiple layers of thecomponents, such as transistors, resistors, and capacitors, during thefabrication process. The connections between the layers are known asvias. In integrated circuit design, a via is a small opening in aninsulating oxide layer that allows a conductive connection betweendifferent layers. Multiple vias may be coupled together in what may bereferred to as a “via chain” connecting one conductive region in an ICto another conductive region in the same or an adjacent IC.

A manufacturing error in one of the components may render an IC orsemiconductor device incapable of functioning properly. For example,consider a memory device containing several ICs. If a transistor withinone of the ICs fails to function properly, the memory device may producememory errors. Vias are also subject to manufacturing errors. When amanufacturing error occurs in a via, the via may not conduct properlyand thus may prohibit an IC from functioning correctly. For instance, anopen via or a partially open via is a break in the circuit, which mayprohibit a device from functioning as designed. An open via may have ahigh or infinite resistance, and a partially open via may have a higherthan average resistance. On the other hand, the via could be shorted toa neighbor interconnect line or via, which may also prohibit a devicefrom functioning as designed. Therefore, testing via structures is afundamental aspect of IC production and reliability.

SUMMARY

An exemplary wafer structure herein comprises integrated circuit chips.Kerf areas are located between the integrated circuit chips. Via chaintest structures are in at least one of the kerf areas and the integratedcircuit chips. The via chain test structures comprise a first conductorin a first area of the wafer structure. First via chains are connectedat individual points to the first conductor. Each of the first viachains comprises an open-ended electrical circuit beginning at the firstconductor and ending in an insulated region of a second area of thewafer structure. The via chain test structures also comprise a secondconductor in the second area of the wafer structure. Second via chainsare connected at individual points to the second conductor. Each of thesecond via chains comprises an open-ended electrical circuit beginningat the second conductor and ending in an insulated region of the firstarea of the wafer structure.

An exemplary structure for testing an integrated circuit hereincomprises a first electrically conductive spine having first electricalconnectors protruding from a base of the first electrically conductivespine. First via chains are operatively connected to the firstelectrical connectors. Each of the first via chains comprises anopen-ended electrical circuit beginning at the first electricallyconductive spine. This structure for testing an integrated circuit alsocomprises a second electrically conductive spine having secondelectrical connectors protruding from a base of the second electricallyconductive spine. Second via chains are operatively connected to thesecond electrical connectors. Each of the second via chains comprises anopen-ended electrical circuit beginning at the second electricallyconductive spine.

An exemplary method comprises simultaneously manufacturing integratedcircuit chips on a wafer and forming via chain test structures in atleast one of kerf areas of the wafer and the integrated circuit chips.The kerf areas of the wafer are located between the integrated circuitchips. The via chain test structures are tested, and therefore ICmanufacturing process can be monitored and reliability performance canalso be assessed. After testing the via chain test structures, the waferis divided to separate the integrated circuit chips from each other in aprocess that destroys the kerf areas. Forming of the via chain teststructures comprises forming a first conductor having first via chainsconnected at individual points to the first conductor and forming asecond conductor having second via chains connected at individual pointsto the second conductor. The first via chains and the second via chainsalternate along a length of the area between the first conductor and thesecond conductor. The testing comprises performing voltage drop testing,leakage current testing, and/or time-dependent dielectric breakdown(TDDB) testing.

BRIEF DESCRIPTION OF THE DRAWINGS

The devices and methods will be better understood from the followingdetailed description with reference to the drawings, which are notnecessarily drawn to scale and in which:

FIG. 1 is a top view schematic diagram illustrating a wafer according todevices and methods herein;

FIG. 2 is a top view schematic diagram illustrating test structuresaccording to devices and methods herein;

FIG. 3 is a top view schematic diagram illustrating via chains accordingto devices and methods herein;

FIG. 4 is a top view schematic diagram illustrating via chains accordingto devices and methods herein;

FIG. 5A is a side view schematic diagram illustrating via chainsaccording to devices and methods herein;

FIG. 5B is a perspective view schematic diagram illustrating via chainsaccording to devices and methods herein;

FIG. 5C is a perspective view schematic diagram illustrating via chainsaccording to devices and methods herein;

FIG. 6A is a top view schematic diagram illustrating via chainsaccording to devices and methods herein;

FIG. 6B is a top view schematic diagram illustrating via chainsaccording to devices and methods herein;

FIG. 6C is a top view schematic diagram illustrating via chainsaccording to devices and methods herein;

FIG. 6D is a top view schematic diagram illustrating via chainsaccording to devices and methods herein;

FIG. 7 is a flow diagram illustrating devices and methods herein;

FIGS. 8A and 8B are graphs illustrating devices and methods herein; and

FIG. 9 is a schematic diagram of a hardware system according to devicesand methods herein.

DETAILED DESCRIPTION

As mentioned above, electrical test and failure analysis of via and/orserpentine structures are fundamental aspects of IC production. Thedevices and methods herein provide structures and methods that moreaccurately determine shorting and dielectric breakdown when testinglarge area structures.

Vias in a semiconductor device may be tested by measuring the resistanceof via test chains. This technique identifies via chains containing openvias and some partially open vias by their high resistance. The testmodule may be located in the kerf region surrounding the semiconductordie. The kerf regions are areas where the semiconductor wafer will becut to separate individual semiconductor dies when the fabricationprocess is complete. Semiconductor test structures in semiconductor diesor kerf regions contain vias. The examples below are described for teststructures in kerf regions of the wafer; it is contemplated that thetest structures may be located inside the semiconductor dies, as well.Vias are conductors that electrically connect one layer of an integratedcircuit to another layer. Vias may be connected together to form a viachain. The via chain connects layers of components in the semiconductortest structure. Each layer may contain conductive plates. Each platecouples to at least one other plate by one of the vias.

It is relatively easy to measure shorts and dielectric breakdown inmacros with very small area coverage; however, in order to achievedefect density process targets, it is often necessary to make extremelylarge arrays with several links. In large area structures, the highresistance of the structure creates a large voltage drop along thelength of the structure. When the voltage drop along the structure iscomparable to the applied voltage, or alternately, when the currenttravelling along the structure is similar to the leakage current, itbecomes difficult or impossible to accurately determine shorts ormeasure the time and voltage when dielectric breakdown occurs.

Referring now to the drawings, FIG. 1 is a top-view schematicillustration showing a wafer 100 that includes integrated circuit chips102 and kerf areas 104 located between the integrated circuit chips 102.FIG. 2 is also a top-view schematic illustration of an enlarged portionof the structure shown in FIG. 1. More specifically, FIG. 2 illustratestest structures 106 that are located in a kerf area 104.

FIG. 3 is a top enlarged view of test structures 106 shown in FIG. 2. Asshown in FIG. 3, the test structures 106 include a first via teststructure 111 and a second via test structure 115 located in one area ofthe wafer 100. The first via test structure 111 includes a firstelectrically conductive spine 118 in a first area of the wafer 100. Thefirst electrically conductive spine 118 has first electrical connectors121 protruding from a base 124 of the first electrically conductivespine 118. First via chains 126 are operatively connected to the firstelectrical connectors 121. Each of the first via chains 126 comprises anopen-ended electrical circuit beginning at the first electricallyconductive spine 118 and ending in an insulated region of a second areaof the wafer 100 that is adjacent to and contacts the first area of thewafer 100. The second via test structure 115 includes a secondelectrically conductive spine 128 in the second area. The secondelectrically conductive spine 128 has second electrical connectors 131protruding from a base 134 of the second electrically conductive spine128. Second via chains 136 are operatively connected to the secondelectrical connectors 131. Each of the second via chains 136 comprisesan open-ended electrical circuit beginning at the second electricallyconductive spine 128 and ending in an insulated region of the firstarea.

Note: the first via chains 126 end near the second electricallyconductive spine 128 and the second via chains 136 end near the firstelectrically conductive spine 118 (as shown in FIG. 4). Thus, the firstvia test structure 111 begins in the first area and ends in an insulatedarea of the second area and the second via test structure 115 begins inthe second area and ends in an insulated area of the first area. A shortin any of the vias will leak current into the surrounding insulatedareas. Because the via chains of opposing test structures alternatealong the area, such leaking current flows through the insulated area toadjacent vias of the opposing via chains and eventually into theopposing conductive spine, thereby allowing current flow between thefirst spine and the second spine (which theoretically should beinsulated from one another in the absence of any via defects) and suchcurrent leakage or flow between the conductive spines identifiesdefective vias.

Each of the first via chains 126 is made of electrically conductivesegments. As shown in FIG. 4, first conductive segments, such as 403,407, may be formed at a first level of the first via chain 126 in onelayer of the wafer 100, and second conductive segments, such as 411,415, may be formed at a second level of the first via chain 126 inanother layer of the wafer 100. The first conductive segments 403, 407and the second conductive segments 411, 415 are interconnected by vias419 between the layers of the wafer 100.

Additionally, each of the second via chains 136 is made of electricallyconductive segments. As partially shown in FIG. 4, the second via chain136 is made of first conductive segments, such as 423, 427 formed at afirst level, and second conductive segments, such as 431, 435 formed ata second level. The first conductive segments 423, 427 and the secondconductive segments 431, 435 are interconnected by vias 439 between thelayers of the wafer 100 for the second via chain 136.

Note, the various conductive segments 403, 407, 411, 415 of the firstvia chain 126 and the various conductive segments 423, 427, 431, 435 ofthe second via chain 136 form geometrically shaped portions. Referringagain to FIG. 3, the geometrically shaped portions, such as 303, of thefirst via test structure 111 and the geometrically shaped portions, suchas 309, of the second via test structure 115 alternate along a length ofthe kerf area 104. As shown in FIGS. 3 and 4, the conductive segmentsform a substantially rectangular shape. One ordinarily skilled in theart may use other geometric shapes, such as those that are described inmore detail below.

According to devices and methods herein, the first via test structure111 comprises a first electrical circuit beginning at the firstelectrically conductive spine 118 within the first area. Each of thefirst via chains 126 is electrically connected to the first electricallyconductive spine 118. Similarly, the second via chain 115 comprises asecond electrical circuit that begins at the second electricallyconductive spine 128 within the second area. Each of the second viachains 136 is electrically connected to the second electricallyconductive spine 128. However, the first via test structure 111, whichincludes the first via chains 126, is electrically insulated from thesecond via test structure 115, which includes the second via chains 136.

While each of the first via chains 126 is connected on one end to thefirst electrically conductive spine 118, the remaining end of each ofthe first via chains 126 remains free. In a similar fashion, each of thesecond via chains 136 is connected on one end to the second electricallyconductive spine 128, and the remaining end of each of the second viachains 136 remains free. In order to avoid clutter in FIG. 4, someadditional wiring of the second via test structure 115 has intentionallybeen omitted; however, the free end 450 of the second via chains 136 isbest seen in FIG. 4.

As is illustrated in FIGS. 3 and 4, each via chain circuit includes abeginning at the electrically conductive spine, a free end, andgeometrically shaped groupings of via structures that alternate withother geometrically shaped portions of other via chains.

Test structures 106 can be used to measure leakage current in order todetect short circuits in the vias. For example, a test probe can beapplied to each of the first electrically conductive spine 118 and thesecond electrically conductive spine 128. The first electricallyconductive spine 118 is biased at some +V while the second electricallyconductive spine 128 remains at ground. Electrical current is measuredbetween the first electrically conductive spine 118 and the secondelectrically conductive spine 128. If even one pair of vias is shorted,a high leakage current will be detected.

According to devices and methods herein, either or both the first viachains 126 or the second via chains 136 may include one or more testtaps 315, 318 and/or spine connections that enable testing within asingle metal layer.

While the foregoing examples have discussed only two via teststructures, those ordinarily skilled in the art would understand thatthe number of via test structures is not limited and any of the devicesand methods herein could include a large number of via test structures,but such large numbers are not illustrated, simply for ease ofillustration and to simplify understanding. In one example shown inFIGS. 5A-5C, three different via test structures 111, 115, 119 are shownin a cross-sectional schematic (FIG. 5A); perspective cross-sectionalschematic (FIG. 5B); and perspective elevated-view schematic (FIG. 5C).

More specifically, FIG. 5A illustrates three different conductor layers(M_(x), M_(x+1), and M_(x+2)) within an integrated circuit structure,and three different via layers (V_(x), V_(x+1), and V_(x+2)) thatconnect the different conductor layers together. Therefore, as shown inFIG. 5A, the first via test structure 111 includes vias V_(x+2) thatconnect conductor layer M_(x+3) and conductor layer M_(x+2). Similarly,the second via test structure 115 includes vias V_(x) that connectconductor layer M_(x+1) and conductor layer M_(x). In addition, thethird via test structure 119 includes vias V_(x+i) that connectconductor layer M_(x+2) and conductor layer M_(x+1). FIGS. 5A-5Cillustrate that the via chains can be on a single layer or two or morelayers within the integrated circuit structure.

In order to avoid cluttering the drawings, FIGS. 5A-5C only illustrate asingle geometrically shaped portion of each of the via test structures111, 115, 119; however, those ordinarily skilled in the art wouldunderstand that each of the via test structures 111, 115, 119,illustrated in FIGS. 5A-5C, is electrically insulated from the other viatest structures, and each via chain comprises an open-ended electricalcircuit having multiple ones of the geometrically shaped portions.Further, each of the via chains are connected to wiring that allows eachvia chain to be tested from a single location (or from multiplelocations).

The geometrically shaped portions 303, 309 can be of any desired shapeincluding, but not limited to triangles, rectangles, pentagons,hexagons, heptagons, octagons, circles, ovals, etc., and a few of theseshapes are illustrated in FIGS. 6A-6D. Note that in FIGS. 6A-6D, onlythe geometrically shaped portions 303, 309 containing multiple viastructures are illustrated, and all wiring and other associatedstructures are omitted in order to avoid clutter. Therefore, FIG. 6Aillustrates square geometrically shaped portions 303, 309 that can bepositioned in a checkerboard arrangement. Similarly, FIG. 6B illustratestriangle geometrically shaped portions 303, 309, FIG. 6C illustratespentagon geometrically shaped portions 303, 309, and FIG. 6D illustrateshexagon geometrically shaped portions 303, 309. While the drawingsillustrate a limited number of shapes, those ordinarily skilled in theart would understand that many more shapes could be utilized for thegeometrically shaped portions 303, 309 and that the shapes shown hereare merely illustrative and do not limit the devices and methods tothese specific shapes. Any of the geometric structures can alternate bytype, across two or more layers of a kerf area.

As shown above, the via chain test structures 106 comprise a first viatest structure 111 and a second via test structure 115 in the kerf area104. The via test structures 111, 115 are formed such that geometricallyshaped portions 303 of the first via test structure 111 andgeometrically shaped portions 309 of the second via chain 115 alternatealong the length of the kerf area 104.

The via chain test structures 106 described herein enable lowerresistance with the same number of vias in the test structures 106,which allows testing to quickly and non-destructively identify whetherany defective vias are present and provides more accurate determinationof shorts, as well as more accurate dielectric reliability projection.

Testing, using the test structures 106 may include voltage drop testing,current leakage testing, and time-dependent dielectric breakdown (TDDB)testing. In use, the test structures 106 may enable a method fordetermining a quantitative estimate of the effect of series resistancein the test structure by quantitatively establishing a voltage dropthreshold based on actual voltage versus applied voltage.

The structures shown above are used to save time and reduce destructiveeffects when testing. FIG. 7 shows a logic flowchart for a method fortesting an integrated circuit, according to devices and methods herein.More specifically, in item 704 an exemplary method herein simultaneouslymanufactures integrated circuit chips on a wafer and forms via chaintest structures in selected areas of the wafer. The selected areas ofthe wafer may be located in kerf areas between the integrated circuitchips and/or in designated test chips. Forming of the via chain teststructures comprises forming a first conductor having a first via chainsconnected at individual points to the first conductor and forming asecond conductor having a second via chains connected at individualpoints to the second conductor. The first via chains and the second viachains are in an area of the wafer such that geometrically shapedportions of the first via chains and geometrically shaped portions ofthe second via chains alternate (are interwoven) along a length of thearea. The method herein tests the via chain test structures in item 715.The testing comprises performing one of voltage drop testing, currentleakage testing and/or time-dependent dielectric breakdown (TDDB)testing. At 726, after testing the via chain test structures, the waferis divided to separate the integrated circuit chips from each other in aprocess that destroys the kerf areas.

Via chain test structures having a single starting point and a singleending point are known in the art. One or multiple open vias in atypical intertwined via test chain could lead to the entire chain beingunusable for TDDB testing. Standard intertwined via chains suffer fromseveral deficiencies leading to inaccurate reliability projections. Forexample, the high resistance of a single long via test chain produces asignificant voltage drop along the via chain. Such a large voltage dropresults in varying voltage acceleration along the via test chain andvarying of the active device area under stress. The multiple voltagescan then cause the calculated acceleration factor to be too low,resulting in gross over-estimation of the failure rate. Using a highervoltage magnifies the effect.

In order to quantify the voltage drop effect on an area of the wafer, atleast one standard intertwined via chain test structure and onecomb-like via chain test structure, as described herein, can beinstalled in the same area. For more effective determination of IRvoltage drop, a group of chain structures having one traditional viachain test structure and various comb-like via chain test structureswith different numbers of vias in each “finger” can be used. Thetraditional via chain test structure and the total of all the comb-likevia chain test structures have the same number of total vias. The IRdrop for each structure can be quantitatively determined, as well asseries resistance dependence on chain length and leakage current level.The graph in to FIG. 8A shows the leakage current (I) as a function ofvoltage (V) between a first via test chain and a second via test chainfor a group of these structures. The line indicated at 811 shows the IRdrop for a traditional via chain test structure. The lines indicated at822, 833, and 844 represent the IR drop for the comb-like via chain teststructures, as described herein, having different numbers of vias perfinger. Line 844 has the lowest number of vias, which represents theideal case. The effective series resistance of the fingers could bedetermined from the difference between the voltage at a specifiedcurrent and the ideal case. FIG. 8B shows the resistance plotted againstthe number of vias per finger. The inflection point 876 of the graph inFIG. 8B indicates a threshold number of vias per chain to be used in thecomb-like via chain structure for accurate determination of the timeand/or voltage to dielectric breakdown. Once this is done for a givenmetal and via layer combination for a technology, just one comb-like viachain below the threshold could be used for subsequent leakagecurrent/dielectric integrity testing.

In summary, according to devices herein, an exemplary wafer structurecomprises integrated circuit chips. Via chain test structures are inareas of the wafer. The via chain test structures comprise a firstconductor in a first area of the wafer. First via chains are connectedat individual points to the first conductor. Each of the first viachains comprises an open-ended electrical circuit beginning at the firstconductor and ending in an insulated region of a second area of thewafer. The via chain test structures comprise a second conductor in thesecond area of the wafer. Second via chains are connected at individualpoints to the second conductor. Each of the second via chains comprisesan open-ended electrical circuit beginning at the second conductor andending in an insulated region of the first area of the wafer.

According to a method of manufacturing a test structure, integratedcircuit chips are manufactured on a wafer while simultaneously formingvia chain test structures. The via chain test structures may in kerfareas of the wafer and/or test chips. The kerf areas of the wafer arelocated between the integrated circuit chips. After manufacture, the viachain test structures are tested. After testing of the via chain teststructures, the wafer is divided to separate the integrated circuitchips from each other in a process that destroys the kerf areas. Formingof the via chain test structures comprises forming a first conductorhaving first via chains connected at individual points to the firstconductor and forming a second conductor having second via chainsconnected at individual points to the second conductor. The first viachains and the second via chains are in an area of the wafer such thatgeometrically shaped portions of the first via chains and geometricallyshaped portions of the second via chains alternate along a length of thearea. The testing comprises performing voltage drop testing, currentleakage testing, and/or time-dependent dielectric breakdown (TDDB)testing.

Aspects of the present disclosure are described herein with reference toflowchart illustrations and/or block diagrams of methods, apparatus(systems), and computer program products according to various systemsand methods. It will be understood that each block of the flowchartillustrations and/or two-dimensional block diagrams, and combinations ofblocks in the flowchart illustrations and/or block diagrams, can beimplemented by computer program instructions. The computer programinstructions may be provided to a processor of a general purposecomputer, special purpose computer, or other programmable dataprocessing apparatus to produce a machine, such that the instructions,which execute via the processor of the computer or other programmabledata processing apparatus, create means for implementing thefunctions/acts specified in the flowchart and/or block diagram block orblocks.

The flowchart and block diagrams in the figures illustrate thearchitecture, functionality, and operation of possible implementationsof systems, methods, and computer program products according to variousdevices and methods herein. In this regard, each block in the flowchartor block diagrams may represent a module, segment, or portion of code,which comprises one or more executable instructions for implementing thespecified logical function(s). It should also be noted that, in somealternative implementations, the functions noted in the block mightoccur out of the order noted in the figures. For example, two blocksshown in succession may, in fact, be executed substantiallyconcurrently, or the blocks may sometimes be executed in the reverseorder, depending upon the functionality involved. It will also be notedthat each block of the block diagrams and/or flowchart illustration, andcombinations of blocks in the block diagrams and/or flowchartillustration, can be implemented by special purpose hardware-basedsystems that perform the specified functions or acts, or combinations ofspecial purpose hardware and computer instructions.

According to a further system and method herein, an article ofmanufacture is provided that includes a tangible computer readablemedium having computer readable instructions embodied therein forperforming the steps of the computer implemented methods, including, butnot limited to, the method illustrated in FIG. 7. Any combination of oneor more computer readable non-transitory medium(s) may be utilized. Thecomputer readable medium may be a computer readable signal medium or acomputer readable storage medium. The non-transitory computer storagemedium stores instructions, and a processor executes the instructions toperform the methods described herein. A computer readable storage mediummay be, for example, but not limited to, an electronic, magnetic,optical, electromagnetic, infrared, or semiconductor system, apparatus,or device, or any suitable combination of the foregoing. Any of thesedevices may have computer readable instructions for carrying out thesteps of the methods described above with reference to FIG. 7.

The computer program instructions may be stored in a computer readablemedium that can direct a computer, other programmable data processingapparatus, or other devices to function in a particular manner, suchthat the instructions stored in the computer readable medium produce anarticle of manufacture including instructions which implement thefunction/act specified in the flowchart and/or block diagram block orblocks.

Furthermore, the computer program instructions may also be loaded onto acomputer, other programmable data processing apparatus, or other devicesto cause a series of operational steps to be performed on the computer,other programmable apparatus or other devices to produce a computerimplemented process such that the instructions which execute on thecomputer or other programmable apparatus provide processes forimplementing the functions/acts specified in the flowchart and/or blockdiagram block or blocks.

In case of implementing the systems and methods herein by softwareand/or firmware, a program constituting the software may be installedinto a computer with dedicated hardware, from a storage medium or anetwork, and the computer is capable of performing various functions ifwith various programs installed therein.

A representative hardware environment for practicing the systems andmethods herein is depicted in FIG. 9. This schematic drawing illustratesa hardware configuration of an information handling/computer system inaccordance with the systems and methods herein. The system comprises atleast one processor or central processing unit (CPU) 910. The CPUs 910are interconnected via system bus 912 to various devices such as aRandom Access Memory (RAM) 914, Read Only Memory (ROM) 916, and anInput/Output (I/O) adapter 918. The I/O adapter 918 can connect toperipheral devices, such as disk units 911 and tape drives 913, or otherprogram storage devices that are readable by the system. The system canread the inventive instructions on the program storage devices andfollow these instructions to execute the methodology of the systems andmethods herein.

In FIG. 9, CPUs 910 perform various processing based on a program storedin a Read Only Memory (ROM) 916 or a program loaded from a peripheraldevice, such as disk units 911 and tape drives 913 to a Random AccessMemory (RAM) 914. In the RAM 914, required data when the CPU 910performs the various processing or the like is also stored, asnecessary. The CPU 910, the ROM 916, and the RAM 914 are connected toone another via a bus 912. An input/output adapter 918 is also connectedto the bus 912 to provide an input/output interface, as necessary. Aremovable medium, such as a magnetic disk, an optical disk, amagneto-optical disk, a semiconductor memory, or the like, is installedon the peripheral device, as necessary, so that a computer program readtherefrom may be installed into the RAM 914, as necessary.

The system further includes a user interface adapter 919 that connects akeyboard 915, mouse 917, speaker 924, microphone 922, and/or other userinterface devices such as a touch screen device (not shown) to the bus912 to gather user input. Additionally, a communication adapter 920including a network interface card such as a LAN card, a modem, or thelike connects the bus 912 to a data processing network 925. Thecommunication adapter 920 performs communication processing via anetwork such as the Internet. A display adapter 921 connects the bus 912to a display device 923, which may be embodied as an output device suchas a monitor (such as a Cathode Ray Tube (CRT), a Liquid Crystal Display(LCD), or the like), printer, or transmitter, for example.

Those skilled in the art would appreciate that the storage medium is notlimited to the peripheral device having the program stored therein asillustrated in FIG. 9, which is distributed separately from the devicefor providing the program to the user. Examples of a removable mediuminclude a magnetic disk (including a floppy disk), an optical disk(including a Compact Disk-Read Only Memory (CD-ROM) and a DigitalVersatile Disk (DVD)), a magneto-optical disk (including a Mini-Disk(MD) (registered trademark)), and a semiconductor memory. Alternatively,the storage medium may be the ROM 916, a hard disk contained in thestorage section of the disk units 911, or the like, which has theprogram stored therein and is distributed to the user together with thedevice that contains them.

As will be appreciated by one skilled in the art, aspects of the systemsand methods herein may be embodied as a system, method, or computerprogram product. Accordingly, aspects of the present disclosure may takethe form of an entirely hardware system, an entirely software system(including firmware, resident software, micro-code, etc.) or an systemcombining software and hardware aspects that may all generally bereferred to herein as a “circuit,” “module”, or “system.” Furthermore,aspects of the present disclosure may take the form of a computerprogram product embodied in one or more computer readable medium(s)having computer readable program code embodied thereon.

Any combination of one or more computer readable non-transitorymedium(s) may be utilized. The computer readable medium may be acomputer readable signal medium or a computer readable storage medium.The non-transitory computer storage medium stores instructions, and aprocessor executes the instructions to perform the methods describedherein. A computer readable storage medium may be, for example, but notlimited to, an electronic, magnetic, optical, electromagnetic, infrared,or semiconductor system, apparatus, or device, or any suitablecombination of the foregoing. More specific examples (a non-exhaustivelist) of the computer readable storage medium include the following: anelectrical connection having one or more wires, a portable computerdiskette, a hard disk, a random access memory (RAM), a Read Only Memory(ROM), an Erasable Programmable Read Only Memory (EPROM or Flashmemory), an optical fiber, a magnetic storage device, a portable compactdisc Read Only Memory (CD-ROM), an optical storage device, a“plug-and-play” memory device, like a USB flash drive, or any suitablecombination of the foregoing. In the context of this document, acomputer readable storage medium may be any tangible medium that cancontain, or store a program for use by or in connection with aninstruction execution system, apparatus, or device.

A computer readable signal medium may include a propagated data signalwith computer readable program code embodied therein, for example, inbaseband or as part of a carrier wave. Such a propagated signal may takeany of a variety of forms, including, but not limited to,electro-magnetic, optical, or any suitable combination thereof. Acomputer readable signal medium may be any computer readable medium thatis not a computer readable storage medium and that can communicate,propagate, or transport a program for use by or in connection with aninstruction execution system, apparatus, or device.

Program code embodied on a computer readable medium may be transmittedusing any appropriate medium, including, but not limited to, wireless,wireline, optical fiber cable, RF, etc., or any suitable combination ofthe foregoing.

Computer program code for carrying out operations for aspects of thepresent disclosure may be written in any combination of one or moreprogramming languages, including an object oriented programming languagesuch as Java, Smalltalk, C++, or the like and conventional proceduralprogramming languages, such as the “C” programming language or similarprogramming languages. The program code may execute entirely on theuser's computer, partly on the user's computer, as a stand-alonesoftware package, partly on the user's computer and partly on a remotecomputer, or entirely on the remote computer or server. In the latterscenario, the remote computer may be connected to the user's computerthrough any type of network, including a local area network (LAN) or awide area network (WAN), or the connection may be made to an externalcomputer (for example, through the Internet using an Internet ServiceProvider).

Deployment types include loading directly in the client, server, andproxy computers via loading a storage medium such as a CD, DVD, etc. Theprocess software may also be automatically or semi-automaticallydeployed into a computer system by sending the process software to acentral server or a group of central servers. The process software isthen downloaded into the client computers that will execute the processsoftware. The process software is sent directly to the client system viae-mail. The process software is then either detached to a directory orloaded into a directory by a button on the e-mail that executes aprogram that detaches the process software into a directory.Alternatively, the process software is sent directly to a directory onthe client computer hard drive. When there are proxy servers, theprocess will select the proxy server code, determine on which computersto place the proxy servers' code, transmit the proxy server code, andthen install the proxy server code on the proxy computer. The processsoftware will be transmitted to the proxy server, and then stored on theproxy server.

While it is understood that the process software may be deployed bymanually loading directly in the client, server, and proxy computers vialoading a storage medium such as a CD, DVD, etc., the process softwaremay also be automatically or semi-automatically deployed into a computersystem by sending the process software to a central server or a group ofcentral servers. The process software is then downloaded into the clientcomputers that will execute the process software. Alternatively, theprocess software is sent directly to the client system via e-mail. Theprocess software is then either detached to a directory or loaded into adirectory by a button on the e-mail that executes a program thatdetaches the process software into a directory. Another alternative isto send the process software directly to a directory on the clientcomputer hard drive. When there are proxy servers, the process willselect the proxy server code, determine on which computers to place theproxy servers' code, transmit the proxy server code, and then installthe proxy server code on the proxy computer. The process software willbe transmitted to the proxy server, and then stored on the proxy server.

The method as described above is used in the fabrication of integratedcircuit chips. The resulting integrated circuit chips can be distributedby the fabricator in raw wafer form (that is, as a single wafer that hasmultiple unpackaged chips), as a bare die, or in a packaged form. In thelatter case, the chip is mounted in a single chip package (such as aplastic carrier, with leads that are affixed to a motherboard or otherhigher level carrier) or in a multichip package (such as a ceramiccarrier that has either or both surface interconnections or buriedinterconnections). In any case, the chip is then integrated with otherchips, discrete circuit elements, and/or other signal processing devicesas part of either (a) an intermediate product, such as a motherboard, or(b) an end product. The end product can be any product that includesintegrated circuit chips, ranging from toys and other low-endapplications to advanced computer products having a display, a keyboardor other input device, and a central processor.

For electronic applications, semiconducting substrates, such as siliconwafers, can be used. The substrate enables easy handling of the microdevice through the many fabrication steps. Often, many individualdevices are made together on one substrate and then singulated intoseparated devices toward the end of fabrication. In order to fabricate amicrodevice, many processes are performed, one after the other, manytimes repeatedly. These processes typically include depositing a film,patterning the film with the desired micro features, and removing (oretching) portions of the film. For example, in memory chip fabrication,there may be several lithography steps, oxidation steps, etching steps,doping steps, and many others are performed. The complexity ofmicrofabrication processes can be described by their mask count.

In addition, terms such as “right”, “left”, “vertical”, “horizontal”,“top”, “bottom”, “upper”, “lower”, “under”, “below”, “underlying”,“over”, “overlying”, “parallel”, “perpendicular”, etc., used herein areunderstood to be relative locations as they are oriented and illustratedin the drawings (unless otherwise indicated). Terms such as “touching”,“on”, “in direct contact”, “abutting”, “directly adjacent to”, etc.,mean that at least one element physically contacts another element(without other elements separating the described elements).

The terminology used herein is for the purpose of describing particulardevices and methods only and is not intended to be limiting of thedevices and methods. As used herein, the singular forms “a”, “an”, and“the” are intended to include the plural forms as well, unless thecontext clearly indicates otherwise. It will be further understood thatthe terms “comprises” and/or “comprising,” when used in thisspecification, specify the presence of stated features, integers, steps,operations, elements, and/or components, but do not preclude thepresence or addition of one or more other features, integers, steps,operations, elements, components, and/or groups thereof.

The corresponding structures, materials, acts, and equivalents of allmeans or step plus function elements in the claims below are intended toinclude any structure, material, or act for performing the function incombination with other claimed elements as specifically claimed. Thedescriptions of the various devices and methods herein have beenpresented for purposes of illustration, but are not intended to beexhaustive or limited to the devices and methods disclosed. Manymodifications and variations will be apparent to those of ordinary skillin the art without departing from the scope and spirit of the describeddevices and methods. The terminology used herein was chosen to bestexplain the principles of the devices and methods, the practicalapplication or technical improvement over technologies found in themarketplace, or to enable others of ordinary skill in the art tounderstand the devices and methods disclosed herein with variousmodifications as are suited to the particular use contemplated.

What is claimed is:
 1. A wafer structure comprising: integrated circuitchips; kerf areas located between said integrated circuit chips; viachain test structures in at least one of said kerf areas and saidintegrated circuit chips, said via chain test structures comprising: afirst conductor in a first area of said wafer structure; a secondconductor in a second area of said wafer structure; first via chainsconnected at individual points to said first conductor, each of saidfirst via chains comprising an open-ended electrical circuit beginningat said first conductor and ending in an insulated region of said secondarea of said wafer structure; and second via chains connected atindividual points to said second conductor, each of said second viachains comprising an open-ended electrical circuit beginning at saidsecond conductor and ending in an insulated region of said first area ofsaid wafer structure.
 2. The wafer structure according to claim 1, saidfirst via chains being electrically insulated from said second viachains.
 3. The wafer structure according to claim 1, said first viachains and said second via chains comprising: first conductive segmentsformed at a first layer and second conductive segments formed at asecond layer, said first conductive segments and said second conductivesegments being interconnected by vias and forming geometrically shapedportions.
 4. The wafer structure according to claim 3, saidgeometrically shaped portions comprising one of: geometric structuresthat alternate by type, across two or more layers of said waferstructure; and serpentine and comb structures that alternate in type orinstance, in a single layer of said wafer structure.
 5. The waferstructure according to claim 1, at least one of said first conductor andsaid second conductor comprising an electrically conductive spine havingelectrical connectors protruding from a base of said electricallyconductive spine.
 6. The wafer structure according to claim 1, saidfirst via chains comprising first electrical circuits beginning at saidfirst conductor at a first location within said first area, and saidsecond via chains comprising second electrical circuits beginning atsaid second conductor at a second location within said second area.
 7. Astructure comprising: a first electrically conductive spine in a firstarea of a semiconductor wafer, said first electrically conductive spinehaving first electrical connectors protruding from a base of said firstelectrically conductive spine; a second electrically conductive spine ina second area of said semiconductor wafer, said second electricallyconductive spine having second electrical connectors protruding from abase of said second electrically conductive spine; first via chainsoperatively connected to said first electrical connectors, a first viachain being operatively connected to each of said first electricalconnectors, each of said first via chains comprising an open-endedelectrical circuit beginning at said first electrically conductive spineand ending in an insulated region of said second area; and second viachains operatively connected to said second electrical connectors, asecond via chain being operatively connected to each of said secondelectrical connectors, each of said second via chains comprising anopen-ended electrical circuit beginning at said second electricallyconductive spine and ending in an insulated region of said first area.8. The structure according to claim 7, said first via chains beingelectrically insulated from said second via chains.
 9. The structureaccording to claim 7, said first via chains alternating with said secondvia chains.
 10. The structure according to claim 7, said firstelectrical connectors protruding from said first electrically conductivespine facing said second electrical connectors protruding from saidsecond electrically conductive spine.
 11. The structure according toclaim 7, said first via chains and said second via chains comprising:first conductive segments formed at a first layer of said semiconductorwafer and second conductive segments formed at a second layer of saidsemiconductor wafer, said first conductive segments and said secondconductive segments being interconnected by vias and forminggeometrically shaped portions.
 12. The structure according to claim 11,said geometrically shaped portions comprising one of: geometricstructures that alternate by type, across two or more layers of saidsemiconductor wafer; and serpentine and comb structures that alternatein type or instance, in a single layer of said semiconductor wafer. 13.The structure according to claim 11, one of said first conductivesegments and said second conductive segments further comprising a testtap.
 14. A structure comprising: a wafer having a top surface and abottom surface; integrated circuit chips located on said top surface ofsaid wafer; kerf areas located between said integrated circuit chips onsaid top surface of said wafer; and via chain test structures located insaid kerf areas, said via chain test structures comprising: a firstconductor in a first portion of said kerf areas; a second conductor in asecond portion of said kerf areas; first via chains connected atindividual points to said first conductor, each of said first via chainscomprising an open-ended electrical circuit beginning at said firstconductor and ending in an insulated region of said second portion ofsaid kerf areas; and second via chains connected at individual points tosaid second conductor, each of said second via chains comprising anopen-ended electrical circuit beginning at said second conductor andending in an insulated region of said first portion of said kerf areas.15. The structure according to claim 14, said second portion of saidkerf areas being adjacent to and contacting said first portion of saidkerf areas.
 16. The structure according to claim 14, said first viachains being electrically insulated from said second via chains.
 17. Thestructure according to claim 14, said first via chains and said secondvia chains comprising: first conductive segments formed at a first layerand second conductive segments formed at a second layer, said firstconductive segments and said second conductive segments beinginterconnected by vias and forming geometrically shaped sections of saidfirst via chains and said second via chains.
 18. The structure accordingto claim 17, said geometrically shaped sections comprising one of:geometric structures that alternate by type, across two or more layersof said wafer; and serpentine and comb structures that alternate in typeor instance, in a single layer of said wafer.
 19. The structureaccording to claim 14, at least one of said first conductor and saidsecond conductor comprising an electrically conductive spine havingelectrical connectors protruding from a base of said electricallyconductive spine.
 20. The structure according to claim 14, said firstvia chains alternating with said second via chains.